Masasi Tokai

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

5:45 PM - 6:00 PM

[21p-H137-18] Dependence of the working distance and the applied bias on the surface potential distribution of insulating specimen irradiated by electron beam

〇(M1)Masasi Tokai¹, Takuya Kawamoto¹, Masatoshi Kotera¹ (1.Osaka Inst.)