TAKU NODA

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

6:00 PM - 6:15 PM

[21p-H137-19] Measurement of fogging electron current in Scanning Electron Microscope

〇(M1)TAKU NODA^1,2, Yoshifumi Hagiwara¹, Masatoshi Kotera¹, Raynald Gauvin² (1.Osaka Inst., 2.McGill Univ.)