Ryota Kojima

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P10 (Gymnasium)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[21p-P10-1~24] 15.6 Group IV Compound Semiconductors (SiC)

1:30 PM - 3:30 PM

[21p-P10-9] Effects of nitrogen doping in 4H-SiC by laser ablation of a SiN_x film and its diffusion mechanism

〇Ryota Kojima¹, Hiroshi Ikenoue¹, Masaru Suwa¹, Akihiro Ikeda¹, Daisuke Nakamura¹, Tanemasa Asano¹, Tatsuo Okada¹ (1.Graduate School of I.S.E.E., Kyushu Univ.)