mizuki uchimori

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P11 (Gymnasium)

Poster presentation
| 15 Crystal Engineering
| 15.8 Crystal evaluation, impurities and crystal defects

[21p-P11-1~11] 15.8 Crystal evaluation, impurities and crystal defects

1:30 PM - 3:30 PM

△ [21p-P11-8] Evaluation of SiC crystal with laser annealing (2)

〇mizuki uchimori¹, Fulvio Mazzamuto², Tetsuya Nagai³, Katsuhiko Nakai³, Shuichi Ono⁴, Manabu Arai⁴, Hidekazu Yamamoto¹ (1.Chiba Institute of Technology, 2.SCREEN Semiconductor Solutions/LASSE2, 3.Nippon Steel & Sumikin Technology, 4.New Japan Radio Co., Ltd)

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