Teppei Onuki

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 4:00 PM - 6:00 PM P15 (Gymnasium)

Poster presentation
| 3 Optics and Photonics
| 3.8 Optical measurement, instrumentation, and sensor

[21p-P15-1~23] 3.8 Optical measurement, instrumentation, and sensor

4:00 PM - 6:00 PM

[21p-P15-1] Error characteristics in optical wafer-thickness measurements using coupled analyses of geometrical optics and wave optics

〇Teppei Onuki¹, Hirotaka Ojima¹, Jun Shimizu¹, Zhou Libo¹ (1.Ibaraki Univ.)