Sari Yanagida

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 4:00 PM - 6:00 PM P17 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 6:00 PM

△ [21p-P17-24] Mechanical Property of Cu-Ni-Si Alloy Evaluated by Micro-Compression and Micro-Tensile Testing for Application in MEMS

〇(M1)Sari Yanagida^1,2, Akiyoshi Araki¹, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Takashi Nagoshi³, Equo Kobayashi¹, Hideki Hosoda¹, Tatsuo Sato¹, Masato Sone^1,2 (1.Tokyo Tech, 2.CREST, 3.AIST)

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