Mitsuhisa Hiraiwa

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 4:00 PM - 6:00 PM P17 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 6:00 PM

△ [21p-P17-3] Effect of channel doping on poly-Si TFTs with Multi-Line-Beam CLC

〇Mitsuhisa Hiraiwa¹, Tatsuaki Hirata¹, NguyenThi Thuy¹, Koji Kotani², Shin-Ichiro Kuroki¹ (1.Hiroshima Univ., 2.Touhoku Univ)