Shintaro Otsuka

→ Search for Shintaro Otsuka in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 21, 2016 4:00 PM - 6:00 PM P17 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[21p-P17-1~26] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:00 PM - 6:00 PM

[21p-P17-6] Fabrication of Ge thin films on Si(001) by DC magnetron sputtering

〇(PC)Shintaro Otsuka¹, Takahiro Mori¹, Yukinori Morita¹, Noriyuki Uchida¹, Yongxun Liu¹, Shinichi O'uchi¹, Hiroshi Fuketa¹, Shinji Migita¹, Meisyoku Masahara¹, Takashi Matsukawa¹ (1.AIST)

▲