The 63rd JSAP Spring Meeting, 2016

Kazuya Uchijima

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

  • Poster presentation
  • | 6 Thin Films and Surfaces
  • | 6.2 Carbon-based thin films

[21p-P3-1~21] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[21p-P3-15] Fabrication of Amorphous Carbon Nitride Thin Films Ⅱ

〇Kazuya Uchijima1, Masaki Satake2, Junji Sawahata3, Shigeyuki Nakamura4, Ken-ichi Takarabe5, Kazutoshi Fukui6, Kazutoshi Ikeda6, Kunio Itoh1, Shin-ichi Yamamoto1 (1.Ryukoku Univ., 2.Akashi Nat. College of Tech., 3.Ibaraki Nat. College of Tech., 4.Tsuyama Nat. College of Tech., 5.Okayama Univ. of Sci., 6.Fukui Univ.)