Tomohiro Shinagawa

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P3 (Gymnasium)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[21p-P3-1~21] 6.2 Carbon-based thin films

1:30 PM - 3:30 PM

[21p-P3-7] The Growth of Polycrystalline Diamond on DLC coated Silicon substrate with Microwave Plasma-enhanced Chemical Vapor Deposition

〇Tomohiro Shinagawa¹, Takeo Furuhata¹, Hiroya Yamarin¹, Keisuke Nakamura¹, Hideaki Yamada², Mikio Yamamuka¹ (1.Mitsubishi Electric Corp., 2.AIST)