SHUN FUKAI

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P4 (Gymnasium)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma measurements and diagnostics

[21p-P4-1~3] 8.2 Plasma measurements and diagnostics

1:30 PM - 3:30 PM

[21p-P4-2] Diagnosis of Ar/CH₄ Plasmas for Diamond-like Carbon Films using Mass Spectrometry

〇SHUN FUKAI¹, ODA AKINORI¹, KOUSAKA HIROYUKI², OHTA TAKAYUKI³ (1.Chiba Inst. Technol., 2.Nagoya Univ., 3.Meijo Univ.)