Jun Miyawaki

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 3:30 PM P5 (Gymnasium)

Poster presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[21p-P5-1~2] 8.4 Plasma etching

1:30 PM - 3:30 PM

[21p-P5-1] Fast local etching of Si substrates using inward plasma

〇Jun Miyawaki¹, Ryo Kanou², Hiroshi Suga², Toshitaka Kubo¹, Atsushi Ando¹, Satoshi Takahashi³, Shun'ichiro Shimbori³, Tetsuo Shimizu¹ (1.AIST, 2.CIT, 3.Sanyu Co.,Ltd.)

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