Mimura Takanori

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:45 PM - 7:00 PM W641 (W6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[21p-W641-1~19] 6.1 Ferroelectric thin films

3:45 PM - 4:00 PM

△ [21p-W641-8] Growth of orientation-contolled ferroelectric HfO₂ thin films by solid phase crystallization and their characterization

〇Mimura Takanori¹, Katayama Kiriha¹, Shimizu Takao², Uchida Hiroshi³, Kiguchi Takanori⁴, Akama Akihiro⁴, Konno Toyohiko⁴, Sakata Osami⁵, Funakubo Hiroshi^1,2 (1.Tokyo Tech. IGS, 2.Tokyo Tech. MECS, 3.Sophia Univ. FST, 4.Tohoku Univ. IMR, 5.NIMS)