Masao Noma

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:30 AM - 11:30 AM P6 (Gymnasium)

Poster presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[22a-P6-1~19] 15.4 III-V-group nitride crystals

9:30 AM - 11:30 AM

[22a-P6-17] Phase change and adhesion property of BN films prepared by Reactive Plasma-Assisted Coating (RePAC)

〇Masao Noma¹, Michiru Yamashita², Koji Eriguchi³, Shigehiko Hasegawa⁴ (1.SHINKO SEIKI. Co., LTD., 2.Hyogo Prefectural Institute of Technolog, 3.Kyoto Univ., 4.Osaka Univ.)

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