Yuta Tominaga

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 11:45 AM W541 (W5)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[22a-W541-1~10] 13.8 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

△ [22a-W541-8] Electrical Characterization of SiO₂ / GaN Vertical MOS Capacitor treated by
High Pressure Water Vapor Annealing

〇Yuta Tominaga¹, Ueno Katsunori², Koji Yoshitsugu¹, Tada Yuki¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST, 2.Fuji Electric)