Tamiko Ooshima

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

12:30 PM - 12:45 PM

[22a-W611-14] Sputtering Deposition of AZO Using the Mixed Powder Targets

〇Tamiko Ooshima¹, Hiroharu Kawasaki¹, Yoshihito Yagyu¹, Takeshi Ihara¹, Yoshiaki Suda¹ (1.Natl. Inst. Tech. Sasebo Col.)