Kosuke Takenaka

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

9:15 AM - 9:30 AM

[22a-W611-2] Low-temperature Formation of a-IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputtering

Yuichi Setsuhara¹, Keitaro Nakata¹, Yoshikatsu Satake¹, 〇Kosuke Takenaka¹, Giichiro Uchida¹, Akinori Ebe² (1.Osaka Univ., 2.EMD Corp.)