Taku Suyama

→ Search for Taku Suyama in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

9:30 AM - 9:45 AM

[22a-W611-3] Mechanism Examination in Surface Roughness Improvement of VHF-DC Superimposed Magnetron Sputtering

〇Taku Suyama¹, Takashi Fukui¹, Kenta Setaka¹, Kensuke Sasai¹, Hirotaka Toyoda^1,2 (1.Nagoya Univ., 2.PLANT Nagoya Univ.)