The 63rd JSAP Spring Meeting, 2016

Masaharu Shiratani

→ Search for Masaharu Shiratani in Google Scholar

Chairperson, etc.

Sun. Mar 20, 2016 10:45 AM - 11:30 AM KD (KD)

  • Outstanding Achievement Award
  • | Outstanding Achievement Award
  • | [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

[20a-KD-6~6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

Masaharu Shiratani(Kyushu Univ.)