Session information

Outstanding Achievement Award

Outstanding Achievement Award » [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

[20a-KD-6~6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

Sun. Mar 20, 2016 10:45 AM - 11:30 AM KD (KD)

Masaharu Shiratani(Kyushu Univ.)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

10:45 AM - 11:30 AM

[20a-KD-6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

〇Yasuhiro Horiike¹ (1.Univ. of Tsukuba)

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