Outstanding Achievement Award
[20a-KD-6~6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization
Sun. Mar 20, 2016 10:45 AM - 11:30 AM KD (KD)
Masaharu Shiratani(Kyushu Univ.)
△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation
10:45 AM - 11:30 AM
〇Yasuhiro Horiike1 (1.Univ. of Tsukuba)
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