The 63rd JSAP Spring Meeting, 2016

Sessions

Outstanding Achievement Award » [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

Outstanding Achievement Award

[20a-KD-6~6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

Sun. Mar 20, 2016 10:45 AM - 11:30 AM KD (KD)

Masaharu Shiratani(Kyushu Univ.)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

×

Authentication

×

Please log in with your participant account.
» Participant Log In