[19a-P1-1~17] 7 Beam Technology and Nanofabrication（Poster）

[19a-P1-3] Fabrication of Mo Spindt emitter cathode using high power pulsed magnetron sputtering with plasma potential control

〇Tomoki Narita¹, Kei Oya¹, Takeo Nakano¹, Masayoshi Nagao², Hisashi Ohsaki² (1.seikei univ., 2.AIST)

Keywords:sputtering,plasma potential,Spindt-type emitter