9:30 AM - 11:30 AM
[19a-P1-3] Fabrication of Mo Spindt emitter cathode using high power pulsed magnetron sputtering with plasma potential control
Keywords:sputtering,plasma potential,Spindt-type emitter
Poster presentation
7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(Poster)
Sat. Mar 19, 2016 9:30 AM - 11:30 AM P1 (Gymnasium)
9:30 AM - 11:30 AM
Keywords:sputtering,plasma potential,Spindt-type emitter