[19a-P1-1~17] 7 Beam Technology and Nanofabrication（Poster）

[19a-P1-5] Quick X-ray reflectometry and its applications

〇Kenji Sakurai¹ (1.NIMS)

Keywords:realtime analysis,dynamics,glass transition

X-ray reflectivity technique is powerful in exploring buried layers and interfaces in function thin films. So far, it has been belivend that realtime analyis is extremly difficult. The present paper reports the latest instrumentation as well as some applications.