[19a-P1-1~17] 7 Beam Technology and Nanofabrication（Poster）

[19a-P1-6] One-dimensional microscopic analysis of X-ray induced phenomena on a Au/SiOx sample surface by means of XANAM

〇Shushi Suzuki¹, Shingo Mukai², Wang-Jae Chun³, Masaharu Nomura⁴, Kiyotaka Asakura² (1.Nagoya Univ., 2.Hokkaido Univ., 3.ICU, 4.KEK-PF)

Keywords:X-ray,imaging,NC-AFM

For elemental and chemical analysis on nano-structures at surfaces/interfaces, we developed X-ray aided noncontact atomic force microscopy (XANAM). Based on our previous results on detail force spectral analysis at a point on a surface, spatial resolution of XANAM as an elemental imaging methodology was evaluated. We will report on one-dimensional microscopic analysis of force spectra on a Au/SiOx sample surface, as well as their analysis on force components.