The 63rd JSAP Spring Meeting, 2016

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[19p-H103-1~21] 6.2 Carbon-based thin films

Sat. Mar 19, 2016 1:15 PM - 7:00 PM H103 (H)

Hiroshi Kawarada(Waseda Univ.), Tokuyuki Teraji(NIMS), Shozo Kono(Waseda Univ.), Norio Tokuda(Kanazawa Univ.)

5:45 PM - 6:00 PM

[19p-H103-17] Fabrication of diamond surface-channel FET structure using ferroelectric gate insulator (2)

Ryota Karaya1, Hiroki Huruichi1, Ikki Baba1, Yosuke Mori1, Takashi Nakajima2, Norio Tokuda1, 〇Takeshi Kawae1 (1.Kanazawa Univ., 2.Tokyo Univ. of Sci.)

Keywords:Diamond,VDF-TrFE