5:00 PM - 5:15 PM
[19p-H112-15] Crystal Growth and Evaluation of Flouride Optical Crystal
Keywords:scavenger,ArF excimer laser,floride optical crystal
I became high purity using a gas scavenger to prepare the optical crystal with the tolerance into the ArF excimer laser of 193nm so that metal ions did not remain behind. In addition, I rearranged the crystal and suppressed the outbreak of the defect. I performed gamma beam irradiation and checked the evaluation by a transmissivity drop.