[19p-H113-1~9] 6.5 Surface Physics, Vacuum

[19p-H113-1] Vacuum Conductance of Rare Gas through Nanopipette (2)

〇Tomohide Takami¹, Tadahiko Goto², Yuji Takakuwa² (1.Kogakuin Univ., 2.IMRAM, Tohoku Univ.)

Keywords:nanopipette,vacuum conductance,glass capillary

We have been developing a method to evaluate the parameters of glass nanopipette, such as inner diameter, by measuring the vacuum conductance of rare gas. In our previous report, the gas flow was from the wider inlet to the small top tip, which frequently caused the clogging with the dust in vacuum chamber. In this study, we set the nanopipette flow in the opposite way to prevent from clogging. Moreover, we have measured the small flow rate by closing the valve of the downstream chamber to integrate the flow.