[19p-H137-1~17] 7.1 X-ray technologies

[19p-H137-11] Development of grazing incidence condenser for SX microscope in Water window

〇Takeo Ejima¹, Tadashi Hatano¹, Yoshiki Kondo², Yuh-ichi Ono², Thanh Hung Dinh², Takeshi Higashiguchi² (1.IMRAM, Tohoku Univ., 2.Utsunomiya Univ.)

Keywords:Water window,reflection multilayer,soft X-ray microscope

A grazing incidence condenser is developing for objectives with large numerical aperture working in Water-window wavelength region (λ= 2.3–4.5 nm) with a point light source. A Sc/Cr reflection multilayer is designed to reflect soft x-ray light at 4.0 nm wavelength for an objective of which NA is 0.25 and the distance between the focal points, 280 mm. Calculated reflectance of the mirror is 0.32 at 4.0 nm wavelength. In the session, measurement results will be presented.