[19p-H137-1~17] 7.1 X-ray technologies

[19p-H137-15] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source (2)

〇Akira Sasaki¹, Atsushi Sunahara², Katsunobu Nishihara³ (1.JAEA, 2.ILT, 3.ILE Osaka Univ.)

Keywords:lithography,simulation,hydrodynamics

We investigate the fragmentation and particle emission from Sn targets for the EUV source for the next generation microlithography. We develop a 2 dimensional Lagrangian hydrodynamics code. For the code, we develop methods for reorganizing mesh to calculate the spatial arrangement of particles. We also develop a method for calculating the properties of the phase transition, such as the mass and volume ratio between fluid and liquid and latent heat for the given temperature and densiy, using the theory of the thermal equilibrium. The model is appllied to a test calculation of expanding hot Sn target.