Akira Sasaki

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:15 PM - 5:45 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[19p-H137-1~17] 7.1 X-ray technologies

5:00 PM - 5:15 PM

[19p-H137-15] Modeling of fragmentation of the target for laser pumped plasma (LPP) EUV source (2)

〇Akira Sasaki¹, Atsushi Sunahara², Katsunobu Nishihara³ (1.JAEA, 2.ILT, 3.ILE Osaka Univ.)