[19p-P11-1~14] 12.2 Characterization and Materials Physics

[19p-P11-5] Development of real-time mixed gas control and measuring system of
all-printed polyimide capacitive humidity sensors

〇Zihan Yuan¹, Eiji Itoh¹ (1.shinshu Univ.)

Keywords:Measurement system,Polyimide,Humidity sensor