[19p-P12-1~27] 21.1 Joint Session K

[19p-P12-12] Fabrication of In-Ga-Mg-O thin films by molecular precursor method

〇Takahashi Yuki¹, Ryosuke Goto¹, Taihei Yasuno¹, Takeyoshi Onuma¹, Hiroki Nagai¹, Tomohiro Yamaguchi¹, Mitsunobu Sato¹, Tohru Honda¹ (1.Kogakuin Univ.)

Keywords:molecular precursor method