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△ [19p-P12-23] Relationship between the carrier concentration and the O1s spectra in ZnO films deposited by the RF sputtering method
Keywords:ZnO film,XPS analysis,oxygen spectra
In this review, we uesd Gaussian-Fitting method to analyze the O1s spectrum which was measured from the XPS data of no-doped ZnO films. In this way, we found the the relationship between the carrier concentration and the O1s spectra.