[19p-P12-1~27] 21.1 Joint Session K

△ [19p-P12-23] Relationship between the carrier concentration and the O1s spectra in ZnO films deposited by the RF sputtering method

〇(D)Jiesheng Zhang¹, Shingo Sato¹, Yasuhisa Omura¹, Tadashi Saitoh¹ (1.Kansai Univ.)

Keywords:ZnO film,XPS analysis,oxygen spectra

In this review, we uesd Gaussian-Fitting method to analyze the O1s spectrum which was measured from the XPS data of no-doped ZnO films. In this way, we found the the relationship between the carrier concentration and the O1s spectra.