The 63rd JSAP Spring Meeting, 2016

Presentation information

Poster presentation

Joint Session K » Joint Session K

[19p-P12-1~27] 21.1 Joint Session K

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P12 (Gymnasium)

4:00 PM - 6:00 PM

[19p-P12-7] Mist CVD growth of In2O3 films on (0001)a-Al2O3 substrate and (0001)GaN template

Takuya Kobayashi1, Keisuke Tanuma1, Tomohiro Yamaguchi1, Takeyoshi Onuma1, Tohru Honda1 (1.Kogakuin Univ.)

Keywords:crystal growth,mist chemical vapor deposition