[19p-P3-1~7] 13.3 Insulator technology

▲ [19p-P3-7] Research on passivation of semicounductor surfaces by heat treatment in liquid water

〇takayuki motoki¹, tomohiko nakamura¹, masahiko hasumi¹, toshiyuki sameshima¹, tomohisa mizuno² (1.TUAT, 2.Kanagawa Univ.)

Keywords:passivation,semiconductor