The 63rd JSAP Spring Meeting, 2016

Presentation information

Print

Poster presentation

8 Plasma Electronics » 8.3 Deposition of thin film and surface treatment

[19p-P6-1~8] 8.3 Deposition of thin film and surface treatment

Sat. Mar 19, 2016 4:00 PM - 6:00 PM P6 (Gymnasium)

4:00 PM - 6:00 PM

[19p-P6-3] High-Speed Plasma CVD using Microwave Plasma Produced inside Slot-Antenna

〇(M1)Masaki Yamamoto1, Suzuki Haruka1, Toyoda Hirotaka1,2 (1.Nagoya Univ., 2.PLANT, Nagoya Univ.)

Keywords:Plasma CVD,Microwave Plasma