[19p-P6-1~8] 8.3 Deposition of thin film and surface treatment

[19p-P6-6] Electron Emission Characteristics of Si Emitter for Thermionic Energy Converter Treated with Atmospheric Pressure Plasma Jet

〇(M1)Kenjiro Murata¹, Akihisa Ogino¹ (1.Shizuoka Univ.)

Keywords:thermionic emission,atmospheric pressure plasma jet,oxidation

To improve the electron emission characteristics in thermionic energy converter, the stable alkali-metal adsorption on oxidized surface will be important. In this study, atmospheric pressure plasma jet was selected as a method of surface oxidation. The electron emission characteristics was measured at the emitter temperature of 500 ° C. To decrease the electron affinity, Cs was supplied to emitter surface by using Cs dispenser. As a result, it was found that emission current increased with increase of the amount of supplied Cs.