Evaluations of Fe and Ni in Multicrystalline Silicon for Metal Contaminations and P Gettering by PL Imaging

Presentation information

Symposium

Symposium » Blazing frontier of luminescence imaging for characterization of semiconductor crystals and devices

Sat. Mar 19, 2016 1:30 PM - 5:45 PM S011 (S0)

Yasuaki Ishikawa(NAIST), Ryuji Katayama(Tohoku Univ.), Hiroshi Yano(Univ. of Tsukuba)

2:15 PM - 2:30 PM

〇Ryota Suzuki¹, Norihiro Ikeno^1,2, Takuto Kojima¹, Yoshio Oshita³, Atsushi Ogura¹ (1.Meiji Univ., 2.JSPS Research Fellow DC, 3.Toyota Tech. Inst.)

Keywords:PL imaging