[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

[19p-S224-1] Area-selective organic-inorganic hybridization of PS-block-PMMA
~Comparison between semi-static mode and continuous flow mode~

〇Nobuya Hiroshiba¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ.)

Keywords:atomic layer deposition (ALD),sequential infiltration synthesis (SIS),block copolymer

We demonstrate the organic-inorganic hybridization of PS-block-PMMA utilizing semi-static mode (SSM) and continuous flow mode (CFM). In general, SSM is used for sequential infiltration synthesis (SIS) and CFM is used for atomic layer deposition (ALD). In this study, we compared the nanostructures in PS-block-PMMA hybridized with SSM and CFM processes.