[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

[19p-S224-13] Dependence of de-molding force and defects rate on template stiffness

〇Naoto Nakamura¹, Chalvin Florian², Hiroaki Kawata¹, Yoshihiko Hirai¹ (1.Osaka Pref Univ., 2.ENSEA)

Keywords:nanoimprint,de-molding,stiffness

For nanoimprint, it is important for the optimization of materials and the process to elucidate the mechanism of defect outbreak in releasing process.Here,the influenece that stiffness of mold gives releasing process is paid attention.In experiment ,relative bend with the mold is changed by changing
the stiffness of substrate, then , the force necessary fo mold release and defect rate is verified.