The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)

3:45 PM - 4:00 PM

[19p-S224-9] Fabrication of 3D structure with fine patterns by novel reversal imprinting

〇(B)Yuki Sawada1, Kazuo Fujii1, Hiroaki Kawata1, Masaaki Yasuda1, Yoshihiko Hirai1 (1.Osaka Pref. univ.)

Keywords:reversal imprint,3D structure,polyvinylalcohol