12:00 PM - 12:15 PM
△ [20a-H113-10] Photoluminescence analysis of impurity effects in highly doped Si
Keywords:Si crystal,Photoluminescence,Impurity effect
Presentation information
Oral presentation
15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
[20a-H113-1~12] 15.8 Crystal evaluation, impurities and crystal defects
Sun. Mar 20, 2016 9:30 AM - 12:45 PM H113 (H)
Kentaro Kutsukake(Tohoku Univ.), Yuta Nagai(GlobalWafers Japan)