The 63rd JSAP Spring Meeting, 2016

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15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[20a-H113-1~12] 15.8 Crystal evaluation, impurities and crystal defects

Sun. Mar 20, 2016 9:30 AM - 12:45 PM H113 (H)

Kentaro Kutsukake(Tohoku Univ.), Yuta Nagai(GlobalWafers Japan)

10:15 AM - 10:30 AM

[20a-H113-4] Interstitial Generation in CZ Silicon Crystals contacted with Melt during Pulling-Stop

〇Takao Abe1, Toru Takahashi1, Koun Shirai2 (1.ShinEtsu Handotai, 2.ISIR, Osaka Univ.)

Keywords:CZ Silicon Crystals