Production of carbonnano-material using supercritical-C<sub>2</sub>H<sub>5</sub>OH for new LSI interconnects

Presentation information

Poster presentation

17 Nanocarbon Technology » 17 Nanocarbon Technology（Poster）

Sun. Mar 20, 2016 9:30 AM - 11:30 AM P4 (Gymnasium)

9:30 AM - 11:30 AM

〇(M1)kei nisikawa¹, Takumi Honma¹, Kenta Suhara¹, Yoshio Uhara¹, Masatoshi Itoh¹, Katsuto Otake¹, Shigeru Saito¹ (1.Tokyo Univ. of Science)

Keywords:Supercritical ethyl alcohol,Carbonnano material,Interconnects