[20a-P4-1~71] 17 Nanocarbon Technology（Poster）

△ [20a-P4-3] Effects of chlorine gas on the CNT growth by a mist catalyst CVD method

〇Toshiya Kinoshita¹, Motoyuki Karita¹, Takayuki Nakano¹, Yoku Inoue¹, Hirokazu Nagaoka², Tetsuharu Miwa², Takayuki Miyabayashi² (1.Shizuoka Univ., 2.JNC Petrochemical)

Keywords:CNT growth,Mist catalyst CVD,Chlorine gas

Dense, super-aligned and long MWCNT arrays were synthesized by the addition of chlorine gas in the CNT growth process using a mist catalyst CVD method. Chlorine gas also increased crystal quality of the CNTs. It was revealed that chlorine improves not only growth rate and catalyst life time but also crystal quality. Effects of chlorine gas on the CNT growth were discussed.