[20a-S222-1~11] 21.1 Joint Session K

△ [20a-S222-1] Clarification of the growth factors of Ga-doped ZnO films by ion-plating with dc arc discharge: Quantitative analysis of flying particles

〇Hisashi Kitami¹, Toshiyuki Sakemi¹, Junichi Nomoto², Hisao Makino^2,3, Yasushi Aoki¹, Takanori Kato¹, Tetsuya Yamamoto² (1.SHI, 2.Research Inst., Kochi Univ. Tech., 3.Kochi Univ. Tech.)

Keywords:transparent conductive oxide,zinc oxide,plasma diagnostics