[20a-S224-1~9] 7.3 Micro/Nano patterning and fabrication

[20a-S224-9] Formation of Au nanoparticles on micro/nano pattern base on poly(vinylpyrrolidone)

〇Satoshi Tsukuda¹, Kazumasa Okamoto², Hiroki Yamamoto³, Takahiro Kozawa³ (1.IMRAM Tohoku Univ., 2.Hokkaido Univ., 3.ISIR Osaka Univ.)

Keywords:EB lithography,Au nanoparticle,poly(vinylpyrrolidone)

Micro/Nano patterns based on poly(vinylpyrrolidone) were fabricated by electron beam lithography. After wet-development, the samples were immersed into the solution congaing HAuCl4. The reduction treatment was carried out by UV irradiation for4-20 minutes. Au nanoparticles were successfully observed on the PVP patterns on Si substrate.