[20a-W611-1~12] 16.3 Bulk, thin-film and other silicon-based solar cells

[20a-W611-8] Visualization of carrier distribution in phosphorus-implanted emitter of single crystalline solar cell using super-higher-order scanning nonlinear dielectric microscopy

〇Kotaro Hirose¹, Katsuto Tanahashi², Hidetaka Takato², Norimichi Chinone¹, Yasuo Cho¹ (1.RIEC, Tohhoku Univ., 2.AIST)

Keywords:semiconductor,doping,Capacitance

We visualized carrier distribution in phosphorus-diffusion and phosphorus-implanted emitter of single crystalline solar cells using super-higher-order scanning nonlinear dielectric solar cell (SHO-SNDM). Local capacitance-voltage characterization was obtained at each pixel by SHO-SNDM. P-type, depletion layer and n-type regions were discriminated from obtained C-V curves. The distribution of depletion layer and n-type regions were influenced by the texture of solar cell surface.